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11 November 1986

Abstract

The rates of plasma oxidation have been measured for homopolymers of several monomers and for copolymers of methyl methacrylate with styrene and vinyl naphthalene. Our results show that relatively small amounts of the aromatic component in the copolymer convey substantially increased resistance to plasma oxidation.

Current knowledge of the mechanisms of plasma oxidation is reviewed and new mechanistic explanations are suggested. The implications for improved design of plasma-developable resists systems are considered.

Citation

Moss, S.J., Jolly, A.M. and Tighe, B.J., 1986. Plasma oxidation of polymers. Plasma chemistry and plasma processing, 6(4), pp.401-416.

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Categories: Photonics & Optoelectronics

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